Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films
C.S. Sandu, Fazel Parsapour, Dan Xiao, Robin Nigon, Lukas M. Riemer, Thomas LaGrange, Paul Muralt
Topics & Concepts
NucleationTexture (cosmology)MicrostructureMaterials scienceScanning electron microscopeDiffractionGrain sizePiezoelectricityBiasingSputteringThin filmCondensed matter physicsAnalytical Chemistry (journal)Composite materialChemistryOpticsNanotechnologyPhysicsComputer scienceQuantum mechanicsVoltageArtificial intelligenceOrganic chemistryChromatographyImage (mathematics)Acoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics