Pulsed laser deposition of SiC thin films and influence of laser-assisted annealing
Emmanuel Paneerselvam, Nilesh J. Vasa, Daisuke Nakamura, I. A. Palani, Mitsuhiro Higashihata, M. S. Ramachandra Rao, Tiju Thomas
Topics & Concepts
Materials sciencePulsed laser depositionAnnealing (glass)Raman spectroscopyLaserSilicon carbideThin filmAmorphous solidOptoelectronicsCarbideDiffractionAnalytical Chemistry (journal)OpticsComposite materialNanotechnologyCrystallographyChemistryPhysicsChromatographySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesDiamond and Carbon-based Materials Research