Nucleation and growth behavior of aluminum nitride film using thermal atomic layer deposition
Hee Ju Yun, Hogyoung Kim, Byung Joon Choi
Topics & Concepts
NucleationMaterials scienceAtomic layer depositionSubstrate (aquarium)NitrideTinMolecular beam epitaxyChemical vapor depositionThin filmChemical engineeringLayer (electronics)NanotechnologyEpitaxyMetallurgyChemistryOrganic chemistryOceanographyEngineeringGeologySemiconductor materials and devicesGaN-based semiconductor devices and materialsAcoustic Wave Resonator Technologies