Preparation and characterization of diamond-like carbon (DLC) film on 316L stainless steel by microwave plasma chemical vapor deposition (MPCVD)
Wen Zhu, SU Zhi-jun, Jintao Guo, Kang Li, Ken Chen, Wenfang Li, Aihua Yi, Zhongmiao Liao, Youbin Luo, Yiwen Hu, Yashu Xu, Quan Lin, Xinpei Meng
Topics & Concepts
Materials scienceChemical vapor depositionX-ray photoelectron spectroscopyRaman spectroscopyCarbon filmScanning electron microscopeDiamondDiamond-like carbonBiocompatibilityCarbon fibersComposite materialDeposition (geology)Chemical engineeringThin filmNanotechnologyMetallurgyComposite numberOpticsBiologySedimentPaleontologyPhysicsEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives