Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge
Radek Žemlička, Mostafa Alishahi, Mojmír Jílek, Pavel Souček, Josef Daniel, J. Klusoň, Hamid Bolvardi, Andreas Lümkemann, Petr Vašina
Topics & Concepts
Glow dischargeSputteringMaterials scienceCoatingDeposition (geology)Electric arcSputter depositionAtom (system on chip)IonCavity magnetronMetallurgyIndentation hardnessPlasmaAnalytical Chemistry (journal)Thin filmComposite materialNanotechnologyChemistryMicrostructurePhysical chemistryPhysicsElectrodeBiologyPaleontologyOrganic chemistrySedimentEmbedded systemChromatographyQuantum mechanicsComputer scienceMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis