Optimizing electrostatic chuck performance through ZrO₂/Al₂O₃ ratio and doping components (SiO₂ and Y₂O₃)
Jongwoo Lim, Dahoon Kim, Nam Hui Lee, Young Gon Kim, Hak Ki Yu, Jae‐Young Choi, Jae-Hyuk Park
Topics & Concepts
Materials scienceDopingEngineering physicsChemical engineeringNanotechnologyOptoelectronicsEngineeringAdditive Manufacturing and 3D Printing TechnologiesAdvanced ceramic materials synthesis3D IC and TSV technologies