Virtual metrology of semiconductor PVD process based on combination of tree-based ensemble model
Ching‐Hsien Chen, Weidong Zhao, Timothy Pang, Yi-Zheng Lin
Topics & Concepts
MetrologyComputer scienceRandom forestSemiconductor device fabricationArtificial intelligenceMachine learningDecision treeAlgorithmWaferMathematicsEngineeringStatisticsElectrical engineeringIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure Analysis