Fabrication of high frequency SAW devices using tri-layer lift-off photolithography
Liam Kelly, Howard Northfield, Sabaa Rashid, Xiaoyi Bao, Pierre Berini
Topics & Concepts
PhotolithographyFabricationPhotoresistMaterials scienceSurface acoustic waveLithographyOptoelectronicsResistLithium niobateLayer (electronics)MiniaturizationOpticsNanotechnologyMedicinePhysicsAlternative medicinePathologyAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsAdvanced MEMS and NEMS Technologies