Low humidity hysteresis and fast response silicon based capacitive humidity sensor based on SiO2 supported GO film
Xinglin Yu, Xinglin Yu, Xiaoyu Li, Sihan Ma, Deng Long, Wentao Li, Kun Tang, Xiang Yu, Xiang Yu, Xing Ding
Topics & Concepts
HumidityCapacitive sensingHysteresisMaterials scienceSiliconOptoelectronicsElectrical engineeringMeteorologyCondensed matter physicsEngineeringPhysicsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Sensor and Energy Harvesting Materials