Optical Grating Techniques for MEMS-Based Spectrometer—A Review
Ajith Ravindran, D. Nirmal, P. Prajoon, D. Gracia Nirmala Rani
Abstract
This paper examined the innovations of the spectrometers for the measurement of consistency based parameters of the handheld Micro Electronic Mechanical System (MEMS) Spectrometer. Fast, highly sensitive, miniature spectroscopy techniques empowered quick, savvy and effective measures for various applications. In the light spectroscopy-based identification and quantification, advances in the field of wavelength discrimination are significant and essential. The identification of grid parameters and limiting conditions are necessary for the design and fabrication of diffraction gratings, for the spectrometer. This work evaluates the emerging trends in Micro-Spectrometer's Grating Techniques, focusing on the aspects of grating parameters and the recent developments of grating. The main parameters for evaluating the performance of a grating have been reviewed and found that grating efficiency, groove density, free spectral range and resolving power play a significant part in the grating performance. The fabrication technique employed as well as the materials used in the fabrication process, play a significant role in the efficiency of the grating. Silicon, Silicon dioxide (SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ), Glass (Silica glass), Poly methyl methacrylate (PMMA), Chromium and Silicon nitride(Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> ) are the most used materials. The integration of new materials that are ideal for the state-of-the-art semiconductor industry techniques for MEMS fabrication along with a new blazing structure would increase the efficiency of the grating.