Vanadium oxide thin film deposited on Si by atomic layer deposition for non-volatile resistive switching memory devices
Wanggon Lee, Shahid Iqbal, Jisu Kim, Sangmin Lee, J. Lee, Mohit Kumar, Hyungtak Seo
Topics & Concepts
Resistive random-access memoryMaterials scienceNon-volatile memoryVanadium oxideOptoelectronicsWaferAtomic layer depositionOxideAnnealing (glass)VanadiumThin filmNanotechnologyElectrical engineeringVoltageMetallurgyEngineeringAdvanced Memory and Neural ComputingTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and Sensors