Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
Rui M. R. Pinto, Ved Gund, Carlos Calaza, K.K. Nagaraja, K. B. Vinayakumar
Topics & Concepts
Dry etchingReactive-ion etchingMaterials scienceEtching (microfabrication)Microelectromechanical systemsPotassium hydroxideUndercutAmmonium hydroxideSurface roughnessNitrideSurface finishThin filmInductively coupled plasmaOptoelectronicsNanotechnologyComposite materialLayer (electronics)PlasmaChemical engineeringChemistryInorganic chemistryQuantum mechanicsEngineeringPhysicsAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsFerroelectric and Piezoelectric Materials