Litcius/Paper detail

Investigating mechanical properties of B4C films produced by magnetron sputtering PVD

Cennet Yıldırım, Erkan Kaçar, Özden Kısacık, Cihan Eseroğlu, Hüseyin Doyuran

2023Solid State Sciences11 citationsDOI

Topics & Concepts

Materials sciencePhysical vapor depositionNanoindentationSputter depositionBoron carbideThin filmChemical vapor depositionBoron nitrideMicrostructureRaman spectroscopySubstrate (aquarium)MetallurgyX-ray photoelectron spectroscopySputteringComposite materialCoatingNanotechnologyChemical engineeringOpticsOceanographyGeologyEngineeringPhysicsBoron and Carbon Nanomaterials ResearchDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics