Impact of acid etching on surfaces and near-surface region in nitrogen plasma terminated polycrystalline diamond
Mohan Kumar Kuntumalla, Arsène Chemin, Nitzan Matos Doron, Maria Brzhezinskaya, Tristan Petit, A. Hoffman
Topics & Concepts
Etching (microfabrication)Polycrystalline diamondPlasma etchingDiamondNitrogenCrystallitePlasmaMaterials scienceNanotechnologyComposite materialChemistryMetallurgyLayer (electronics)Organic chemistryPhysicsQuantum mechanicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsIon-surface interactions and analysis