High-efficiency submerged air jet chemical mechanical polishing at the atomic and close-to-atomic scale
Zili Zhang, Song Yuan, Chi Fai Cheung, Wei Wu, Ze Li, Kangsen Li, Chunjin Wang
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceBrittlenessFiguringJet (fluid)Mechanical engineeringProcess (computing)Composite materialSurface roughnessMetallurgyChemical processScratchSurface finishSurface (topology)Flexibility (engineering)Yield (engineering)Chemical speciesAtomic unitsCharacterization (materials science)Mechanism (biology)Atomic force microscopyEngineering drawingNanotechnologySurface finishingErosion and Abrasive MachiningAdvanced Surface Polishing TechniquesSurface Modification and Superhydrophobicity