Fast fabrication of silicon nanopillar array using electron beam lithography with two-layer exposure method
Xiaodong Wang, Jian Xu, Xueling Quan, Yaqian Li, Ying Wang, Xiulan Cheng
Topics & Concepts
NanopillarFabricationElectron-beam lithographyMaterials scienceNanolithographySiliconLithographyOptoelectronicsLayer (electronics)NanotechnologyOpticsBeam (structure)ResistNanostructurePhysicsPathologyMedicineAlternative medicineNanowire Synthesis and ApplicationsOptical Coatings and GratingsAdvanced Surface Polishing Techniques