Selective nitride passivation using vapor-dosed aldehyde inhibitors for area-selective atomic layer deposition
Haneul Park, Jieun Oh, Jeong‐Min Lee, Woo‐Hee Kim
Topics & Concepts
PassivationMaterials scienceAtomic layer depositionLayer (electronics)Chemical vapor depositionNitrideAldehydeDeposition (geology)Chemical engineeringInorganic chemistryNanotechnologyOrganic chemistryCatalysisChemistryBiologySedimentPaleontologyEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvanced Memory and Neural Computing