Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
Liangge Xu, L. He, Lei Yang, Zhibo Zhang, Shuai Guo, Zhenhuai Yang, Peng Wang, Fangjuan Geng, Gang Gao, Chunqiang Sun, Victor Ralchenko, Jiaqi Zhu
Topics & Concepts
Materials scienceCrystallinityThin filmAtomic layer depositionAnnealing (glass)Transparent conducting filmElectrical resistivity and conductivityOptoelectronicsPlasmaIndium tin oxideAnalytical Chemistry (journal)Composite materialNanotechnologyPhysicsChemistryEngineeringChromatographyElectrical engineeringQuantum mechanicsZnO doping and propertiesSemiconductor materials and devicesGa2O3 and related materials