Direct Measurement of Inverse Piezoelectric Effects in Thin Films Using Laser Doppler Vibrometry

Abstract

This study highlights efforts to develop an accurate, simple methodology to assess the electromechanical response in thin-film heterostructures, using laser Doppler vibrometry to measuring surface displacements smaller than 1 nm. The work demonstrates how to use the measured values to extract the piezoelectric coefficient ${d}_{33}$ for a generic thin-film system by means of finite-element modeling. Finally, the work shows how to assess the electromechanical figure of merit for thin films, and offers a procedure for how to compare them to their bulk counterparts via the electromechanical coupling coefficient ${k}_{33}$.

Topics & Concepts