Morphology of lithium niobium oxide thin film ultrasonic transducers deposited by RF magnetron sputtering
Xiaomei Zeng, Vasiliy Pelenovich, Chang Xu, D. Neena, Yanghui Jiang, Xiangyu Zhang, A.D. Pogrebnjak, R. R. Rakhimov, Jun Zhang, Bing Yang, Sheng Liu, Sheng Liu
Topics & Concepts
Materials scienceNiobium oxideNiobiumSputter depositionUltrasonic sensorLithium (medication)Thin filmSputteringCavity magnetronMorphology (biology)OxideOptoelectronicsLithium niobateComposite materialMetallurgyNanotechnologyAcousticsMedicineBiologyGeneticsEndocrinologyPhysicsFerroelectric and Piezoelectric MaterialsPhotorefractive and Nonlinear OpticsAcoustic Wave Resonator Technologies