Crystallinity improvement of room-temperature PLD-deposited ZnO thin films on cyclo-olefin polymer substrates subject to surface-pretreatment with vacuum-UV-light irradiation
Tomoaki Oga, Ryoya Kai, Naho Kaneko, Hisashi Miyazaki, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
Topics & Concepts
CrystallinityThin filmMaterials scienceIrradiationSubstrate (aquarium)Scanning electron microscopeUltraviolet lightAnalytical Chemistry (journal)OptoelectronicsNanotechnologyChemistryComposite materialChromatographyPhysicsOceanographyNuclear physicsGeologyZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies