Interaction of gas cluster ions with solids: Experiment and computer simulations
V. S. Chernysh, A.E. Ieshkin, Д.С. Киреев, A. V. Nazarov, A.D. Zavilgelsky
Topics & Concepts
SputteringCluster (spacecraft)Materials scienceIonAtomic physicsCrystalliteMolecular dynamicsBeam (structure)Molecular physicsThin filmPhysicsOpticsNanotechnologyMetallurgyQuantum mechanicsComputer scienceProgramming languageIon-surface interactions and analysisnanoparticles nucleation surface interactionsHigh-pressure geophysics and materials