High-dielectric-constant silicon nitride thin films fabricated by radio frequency sputtering in Ar and Ar/N2 gas mixture
Chia-Yueh Chou, Chia-Hua Lin, Wei-Hao Chen, Bao-Jhen Li, Cheng‐Yi Liu
Topics & Concepts
DielectricSputteringMaterials scienceX-ray photoelectron spectroscopyNitrideSilicon nitrideAnalytical Chemistry (journal)Thin filmSiliconOptoelectronicsChemistryNanotechnologyNuclear magnetic resonanceLayer (electronics)ChromatographyPhysicsSemiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceCopper Interconnects and Reliability