Hard and tough (NbTaMoW)Nx high entropy nitride films with sub-stoichiometric nitrogen
Hang Li, Nan Jiang, Jianliang Li, Jiewen Huang, Jian Kong, Dangsheng Xiong
Topics & Concepts
StoichiometryNitrideMaterials scienceSputteringNitrogenMetalAnalytical Chemistry (journal)Elastic modulusFracture toughnessSputter depositionDopingThin filmCrystallographyComposite materialMetallurgyChemistryNanotechnologyLayer (electronics)Physical chemistryOrganic chemistryOptoelectronicsChromatographyMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research