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Structural, mechanical and corrosion resistance of phosphorus-doped TiAlN thin film

Olayinka Oluwatosin Abegunde, M. Makha, Karima Machkih, Hicham Larhlimi, Anas Ghailane, Youssef Samih, Jones Alami

2022Journal of Materials Science12 citationsDOI

Topics & Concepts

Materials scienceThin filmCorrosionDopingRaman spectroscopySputter depositionScanning electron microscopeComposite materialMicrostructureSputteringHigh-power impulse magnetron sputteringMetallurgyOpticsOptoelectronicsNanotechnologyPhysicsMetal and Thin Film MechanicsMXene and MAX Phase MaterialsGaN-based semiconductor devices and materials
Structural, mechanical and corrosion resistance of phosphorus-doped TiAlN thin film | Litcius