Towards understanding the mechanisms of material removal and deformation in GaAs during nanomilling
Jiqiang Wang, Yongda Yan, Hailong Cui, Shaoqin Liu, Chen Li, Yanquan Geng
Topics & Concepts
Materials scienceDeformation (meteorology)Composite materialMetallurgyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsIntegrated Circuits and Semiconductor Failure Analysis