Litcius/Paper detail

Coupled SPH-FEM modeling of Berkovich indenter scratching of single-crystal silicon

Long Li, Peiqi Ge

2024Materials Science in Semiconductor Processing11 citationsDOI

Topics & Concepts

ScratchingMaterials scienceBrittlenessSiliconComposite materialResidual stressSlicingFinite element methodScratchDiamondStructural engineeringEnhanced Data Rates for GSM EvolutionStress (linguistics)MetallurgyMechanical engineeringComputer scienceEngineeringTelecommunicationsPhilosophyLinguisticsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics