Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer
Sung‐Tae Kim, Jurim Jeon, Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi
2022International Journal of Precision Engineering and Manufacturing-Green Technology38 citationsDOI
Topics & Concepts
Fizeau interferometerInterferometryWaferCompensation (psychology)OpticsPhase (matter)Computer scienceAlgorithmMaterials scienceAstronomical interferometerPhysicsOptoelectronicsPsychologyPsychoanalysisQuantum mechanicsOptical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques