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Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer

Sung‐Tae Kim, Jurim Jeon, Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi

2022International Journal of Precision Engineering and Manufacturing-Green Technology38 citationsDOI

Topics & Concepts

Fizeau interferometerInterferometryWaferCompensation (psychology)OpticsPhase (matter)Computer scienceAlgorithmMaterials scienceAstronomical interferometerPhysicsOptoelectronicsPsychologyPsychoanalysisQuantum mechanicsOptical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques
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