Investigation on surface generation mechanism of single-crystal silicon in grinding: Surface crystal orientation effect
Bo Zhao, Bo Zhao, Huan Liu, Jiansheng Pan, Jianwei Wu, Jianwei Wu
Topics & Concepts
Materials scienceGrindingWaferCrystal (programming language)MachiningResidual stressSiliconComposite materialCrystallographyMetallurgyNanotechnologyProgramming languageComputer scienceChemistryAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationForce Microscopy Techniques and Applications