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Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres

Yung-I Chen, Yi-En Ke, Ming-Ching Sung, Li-Chun Chang

2020Surface and Coatings Technology14 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)Molding (decorative)Amorphous solidTemperature cyclingComposite materialNitrideMetallurgySilicon nitrideThermalSiliconChemistryLayer (electronics)Organic chemistryPhysicsMeteorologyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsAdvanced machining processes and optimization
Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres | Litcius