Al2O3 blocking layer inserted ZrO2 Metal-Insulator-Metal capacitor for the improved electrical and interfacial properties
Hongseon Song, Dokyoung Kim, Sangyeol Kang, Hyung‐Suk Jung, Hanjin Lim, Kijung Yong
Topics & Concepts
TinMaterials scienceCapacitorDielectricX-ray photoelectron spectroscopyDiffusion barrierAtomic layer depositionHigh-κ dielectricCapacitanceAnnealing (glass)ElectrodeThin filmMetal-insulator-metalOptoelectronicsAnalytical Chemistry (journal)Composite materialLayer (electronics)NanotechnologyChemical engineeringMetallurgyChemistryElectrical engineeringVoltageChromatographyEngineeringPhysical chemistrySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvanced Memory and Neural Computing