Out-of-plane motion detection in encapsulated electrostatic MEMS gyroscopes: Principal parametric resonance
Sasan Rahmanian, Shahrokh Hosseini-Hashemi, Masoud Rezaei
Topics & Concepts
GyroscopePhysicsParametric oscillatorAcousticsLissajous curveResonance (particle physics)AmplitudeSensitivity (control systems)HarmonicHarmonicsCantileverControl theory (sociology)VoltageMaterials scienceOpticsEngineeringElectronic engineeringComputer scienceControl (management)Particle physicsArtificial intelligenceComposite materialQuantum mechanicsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesGeophysics and Sensor Technology