Dislocation density control of GaN epitaxial film and its photodetector
Linhao Li, Yuhui Yang, Guojie Chen, Wenliang Wang, Hongsheng Jiang, Haiyan Wang, Chenguang Zhang, Deqi Kong, Jinghong Zhang, Zhengtang Luo, Guoqiang Li
Topics & Concepts
ResponsivityMaterials scienceMetalorganic vapour phase epitaxyOptoelectronicsDislocationDark currentUltravioletChemical vapor depositionPhotodetectorSapphireGallium nitrideEpitaxyElectrodeLaserLayer (electronics)OpticsNanotechnologyChemistryComposite materialPhysicsPhysical chemistryGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties