Electrochemical discharge machining of a high-precision micro-holes array in a glass wafer using a damping and confinement technique
Zhixiang Zou, K.C. Chan, Shunzhi Qiao, Kai Zhang, T.M. Yue, Zhongning Guo, Jiangwen Liu
Topics & Concepts
RepeatabilityMaterials scienceElectrolyteWaferMachiningComposite materialElectrodeOptoelectronicsMetallurgyChemistryPhysical chemistryChromatographyAdvanced Machining and Optimization TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization