Balancing sensitivity and resolution by feedback regulation of free radicals from Sn-C bonds in tin-oxygen clusters EBL photoresist
Hao Chen, Xinyan Huang, Yingdong Zhao, Jun Zhao, Pengzhong Chen, Xiaojun Peng
Topics & Concepts
PhotoresistMaterials scienceTinRadicalSensitivity (control systems)OxygenPhotochemistryNanotechnologyOptoelectronicsMetallurgyElectronic engineeringOrganic chemistryChemistryLayer (electronics)EngineeringAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy Techniques