Improving the hardness of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)N coatings via tuning substrate temperature and bias for anti-wear applications
Yu-Chia Lin, Sheng-Yu Hsu, Rui-Wen Song, Wei-Li Lo, Yuan‐Tai Lai, Su-Yueh Tsai, Jenq-Gong Duh
Topics & Concepts
Materials scienceSputter depositionResidual stressSputteringComposite materialNitrideSubstrate (aquarium)High entropy alloysGrain sizeMetallurgyMicrostructureNanotechnologyLayer (electronics)Thin filmGeologyOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies