Structural and optical properties of Si hyperdoped with Te by ion implantation and pulsed laser annealing
Ф. Ф. Комаров, Nikita S. Nechaev, Г. Д. Ивлев, Л. А. Власукова, И. Н. Пархоменко, E. Wendler, I. A. Romanov, Yonder Berencén, V. V. Pilko, Д. В. Жигулин, Alexander F. Komarov
Topics & Concepts
SiliconMaterials scienceAnnealing (glass)PhotodiodeIon implantationLaserOptoelectronicsImpurityPhotosensitivityDopingIonAnalytical Chemistry (journal)ChemistryOpticsComposite materialPhysicsOrganic chemistryChromatographySilicon Nanostructures and PhotoluminescenceAdvanced Semiconductor Detectors and MaterialsSilicon and Solar Cell Technologies