Detailed study of reactively sputtered ScN thin films at room temperature
Susmita Chowdhury, Rachana Gupta, Parasmani Rajput, Akhil Tayal, Dheemahi Rao, Reddy Sekhar, Shashi Prakash, R. Ramaseshan, S. N. Jha, Bivas Saha, Mukul Gupta
Topics & Concepts
Materials scienceThin filmMetallurgyNanotechnologyMetal and Thin Film MechanicsSemiconductor materials and devicesZnO doping and properties