Electron beam lithography inscribed varied-line-spacing and uniform integrated reflective plane grating fabricated through line-by-line method
Wei He, Wenduo Zhang, Fanyong Meng, Lianqing Zhu
Topics & Concepts
GratingOpticsMaterials scienceBlazed gratingHolographic gratingUltrasonic gratingWavelengthDiffraction gratingElectron-beam lithographyOptoelectronicsPhysicsResistLayer (electronics)Composite materialOptical Coatings and GratingsPhotonic and Optical DevicesAdvanced Fiber Optic Sensors