Development of a broadband photodetector utilizing ZnO nanorods with grating structure fabricated via nanoimprint lithography
Ming-Hsien Li, Jyun-Jie Chen, Yi-Sheng Chen, Ssu-Ting Lin, Bo-Hong Lin, Ming‐Yu Kuo, Chun‐Hung Lin, Hsiang Chen, Jung Han, Ming‐Yu Kuo, Chun‐Hung Lin, Hsiang Chen, Jung Han
Topics & Concepts
Materials scienceNanoimprint lithographyNanorodPhotodetectorGratingBroadbandOptoelectronicsLithographyNanotechnologyOpticsFabricationPhysicsPathologyMedicineAlternative medicineZnO doping and propertiesGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator Technologies