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Treatment of Highly Concentrated Fluoride Wastewater from the Semiconductor Industry by CaCl<sub>2</sub> based on the Adjustment of ζ-Potential

Lilong Zhou, Yadong Zhong, Xuepu Cao, Zhao Hua, Runjing Liu

2023ACS ES&T Water17 citationsDOI

Abstract

The semiconductor production process generates a large amount of highly concentrated, acidic, fluorinated wastewater. In this work, wastewater with an initial F – concentration of 1800 mg L –1 from the semiconductor industry was treated using CaCl 2 instead of lime as the calcium source precipitant. The effects of Ca 2+ dose and pH on F – removal were investigated. The results show that the F – removal rate is related to the settling properties of CaF 2 . The ζ potential of CaF 2 particles can be lowered by adjusting the solution pH and the agglomeration of CaF 2 particles can be enlarged, resulting in the increase of defluorination efficiency. The defluorination rate for the actual industrial process reached 99.49%, and a discharge standard of industrial wastewater of 10 mg L –1 was achieved when the n (Ca 2+ )/ n (F – ) was 0.5 at a pH of 8.5. The CaF 2 sludge with high purity can be obtained to realize resourceful utilization of solid waste.

Topics & Concepts

WastewaterLimeSettlingEconomies of agglomerationFluorineChemistryFluorideIndustrial wastewater treatmentSemiconductorSemiconductor industryPulp and paper industryChemical engineeringMaterials scienceInorganic chemistryEnvironmental engineeringEnvironmental scienceMetallurgyOrganic chemistryEngineeringManufacturing engineeringOptoelectronicsFluoride Effects and RemovalPhosphorus and nutrient managementGroundwater and Isotope Geochemistry
Treatment of Highly Concentrated Fluoride Wastewater from the Semiconductor Industry by CaCl<sub>2</sub> based on the Adjustment of ζ-Potential | Litcius