Chip-scale metalens microscope for wide-field and depth-of-field imaging
Xin Ye, Qian Xiao, Yuxin Chen, Rui Yuan, Xingjian Xiao, Chen Chen, Wei Hu, Chunyu Huang, Shining Zhu, Tao Li
Abstract
Microscopy is very important in research and industry, yet traditional optical microscopy suffers from the limited field-of-view (FOV) and depth-of-field (DOF) in high-resolution imaging. We demonstrate a simultaneous large FOV and DOF microscope imaging technology based on a chip-scale metalens device that is implemented by a SiNx metalens array with a co- and cross-polarization multiplexed dual-phase design and dispersive spectrum zoom effect. A 4-mm × 4-mm FOV is obtained with a resolution of 1.74 μm and DOF of 200 μm within a wavelength range of 450 to 510 nm, which definitely exceeds the performance of traditional microscopes with the same resolution. Moreover, it is realized in a miniaturized compact prototype, showing an overall advantage for portable and convenient microscope technology.