Effect of target poisoning ratios on the fabrication of titanium oxide coatings using superimposed high power impulse and medium frequency magnetron sputtering
Bih‐Show Lou, Wei‐Ting Chen, Wahyu Diyatmika, Jong‐Hong Lu, Chen-Te Chang, Po‐Wen Chen, Jyh‐Wei Lee
Topics & Concepts
AnataseMaterials scienceHigh-power impulse magnetron sputteringCoatingSputter depositionCorrosionRutileMicrostructureTitaniumMetallurgySputteringComposite materialChemical engineeringThin filmNanotechnologyChemistryPhotocatalysisBiochemistryEngineeringCatalysisMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchZnO doping and properties