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The influence of CeO2 abrasive size on the performance of photocatalytic assisted chemical-mechanical polishing by Y/Pr co-doping strategy

Ning Xu, Yuxin Luo, Yu Lin, Jiahui Ma, Yongping Pu

2023Colloids and Surfaces A Physicochemical and Engineering Aspects30 citationsDOI

Topics & Concepts

AbrasiveMaterials sciencePhotocatalysisPolishingCerium oxideParticle sizeDopingSurface roughnessChemical engineeringCeriumChemical-mechanical planarizationQuartzComposite materialOxideMetallurgyCatalysisOptoelectronicsChemistryEngineeringBiochemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser-induced spectroscopy and plasma
The influence of CeO2 abrasive size on the performance of photocatalytic assisted chemical-mechanical polishing by Y/Pr co-doping strategy | Litcius