Research progress on porous low dielectric constant materials
Meng Xie, Menglu Li, Quan Sun, Wenjie Fan, Shuang Xia, Wenxin Fu
Topics & Concepts
Materials scienceDielectricPorosityConstant (computer programming)Porous mediumComposite materialLow-k dielectricEngineering physicsNanotechnologyOptoelectronicsComputer scienceProgramming languageEngineeringMetal-Organic Frameworks: Synthesis and ApplicationsAdvanced ceramic materials synthesisCopper Interconnects and Reliability