Microstructure, mechanical and tribological properties of TaCN composite films by reactive magnetron sputtering
Dian Yu, Lihua Yu, Pei Jia, Hongbo Ju, Huang Luo, Junhua Xu, Shinji Koyama
Topics & Concepts
Materials scienceMicrostructureTribologySputter depositionComposite numberAmorphous solidCarbon fibersComposite materialAmorphous carbonPhase (matter)SputteringThin filmNanotechnologyCrystallographyOrganic chemistryChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites