Effects of plasma power on ferroelectric properties of HfO2-ZrO2 nanolaminates produced by plasma enhanced atomic layer deposition
Yeonghwan Ahn, Yerin Jeon, Seokwon Lim, Jiwoong Kim, Jisu Kim, Le Thai Duy, Hyungtak Seo
Topics & Concepts
Materials scienceAtomic layer depositionFerroelectricityOrthorhombic crystal systemOptoelectronicsThin filmPlasmaAnalytical Chemistry (journal)DielectricNanotechnologyOpticsDiffractionChromatographyChemistryQuantum mechanicsPhysicsFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesAdvanced Memory and Neural Computing