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Reducing the reverse leakage current of AlGaN/GaN heterostructures <i>via</i> low-fluence neutron irradiation

Rong Wang, Jianxing Xu, Shiyong Zhang, Ying Zhang, Penghui Zheng, Zhe Cheng, Lian Zhang, Fengxiang Chen, Xiaodong Tong, Yun Zhang, Wei Tan

2021Journal of Materials Chemistry C18 citationsDOI

Abstract

We demonstrate that low-fluence neutron irradiation can be a promising way to reduce the reverse leakage current of AlGaN/GaN heterostructures grown by MOCVD on sapphire substrates while maintaining other electronic properties almost unchanged.

Topics & Concepts

Materials scienceFluenceReverse leakage currentHeterojunctionOptoelectronicsMetalorganic vapour phase epitaxySapphireIrradiationLeakage (economics)NanotechnologyOpticsLaserEpitaxyDiodePhysicsEconomicsNuclear physicsMacroeconomicsLayer (electronics)Schottky barrierGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties
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