Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories
Ming‐Peng Yeh, Lian-fang Wu, En-Tsu Fan, Tony Chen, Tzu-Sou Chuang, Sher Ling Lee, Kuo‐Lun Tung
Topics & Concepts
Nitric acidSemiconductor device fabricationPollutantAir pollutionWaferPollutionAcid rainSemiconductor industryPollution preventionEnvironmental scienceWaste managementEnvironmental engineeringChemistryMaterials scienceEngineeringNanotechnologyManufacturing engineeringInorganic chemistryOrganic chemistryBiologyEcologyVehicle emissions and performanceCatalytic Processes in Materials ScienceRecycling and Waste Management Techniques