High-yield fabrication of electromechanical devices based on suspended Ti<sub>3</sub>C<sub>2</sub>T<sub><i>x</i></sub> MXene monolayers
Saman Bagheri, Jehad Abourahma, Haidong Lu, Nataliia S. Vorobeva, Shengyuan Luo, Alexei Gruverman, Alexander Sinitskii
Abstract
We demonstrate a high-yield fabrication of electromechanical devices based on suspended monolayer Ti 3 C 2 T x MXene flakes. The MXene membranes were electrostatically actuated over multiple cycles and with different frequencies, amplitudes, and loads.
Topics & Concepts
FabricationMonolayerYield (engineering)Materials scienceNanotechnologyOptoelectronicsCrystallographyComposite materialChemistryAlternative medicineMedicinePathologyMXene and MAX Phase Materials2D Materials and ApplicationsGraphene research and applications